Abstract
Vacuum maintaining in the space between the rotor and casing during the gas-feeding and enrichment process is of great importance. Therefore, a piece named molecular pump is attached on the top side of the casing. In this paper, molecular pump simulation was performed using Sawada, Sickafus, Sickafus upgraded analytical methods, and DSMC molecular method and the results of each were compared with the experimental test results. DSMC simulations were also performed for the groove with two trapezoidal and rectangular geometries. Comparing the results with experimental tests, it was shown that the compression ratio obtained by the DSMC method is about 10% different from the experimental test results, and then the upgraded Sickafus method is the most accurate method. It was also shown that the groove with a trapezoidal cross-section increases the compression ratio of the pump by more than 10% compared to the rectangular groove.
Main Subjects