Abstract
Quadrupole mass filter device is a key component in mass spectrometers which analysis ion particles based on their mass to charge ratio; this mean by applying a specific potential on the instrument, crossing most of ions diverge and lost and just some are survived through crossing mass filter. Using multi-physics simulation, one may obtain deep knowledge on performance of the filter and investigate the effect of different variable parameters on operation of the instrument. In this paper by implementing COMSOL multi-physics software the impact of operating line slope stability, ion beam position displacement, and oscillation of potential field on ions filtering is investigated.