Today, membrane separation plays an important role in the industry and is widely used in various industries. One of the most important methods for separating gas components from each other is the gaseous diffusion membrane separation. Studies on the membrane, apart from the geometry and diameter and thickness of the capillaries, can be applied to the kind of membrane. Given the fact that the however the Knudsen number increase, the separation will have occurred more and effective. Therefore, selecting membranes that are capable of operating at high temperatures will increase the Knudsen number and, as a result, increase separation factor. Therefore, generally, in the gas separation industry by membrane method, the use of ceramic membranes that are capable of working at high temperatures is preferable to other membranes. In this paper, two SF6 and VF6 gases are used as two components with the same mass percentage for modeling the gas diffusion system. Due to the fact that the Knudsen number of system are relatively high and the transient flow regime dominates the system, the DSMC method, a method based on the Boltzmann and Monte Carlo equations, is used. In order to investigate the effect of the membrane temperature on the final value of the separation of this system, four temperatures of 310, 350, 450 and 800 K were used with equal conditions and inputs to evaluate the effects of temperature increase on the number of particles and, finally, the separation factor. In the results, it will be shown that with increasing temperature, changes in the enrichment of the waste and product will be higher variation than the input gas, and more efficient separation will be practically done at high temperatures. Therefore, in industries using ceramic membranes and generally membranes that are capable of working at high temperatures, it will be more cost effective than other membranes, and through the cascade and fewer steps it will reach the final richness, which will cause the setup cost Decrease.